Compact Plasma and Focused Ion Beams

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9

Plasma Production in Pulsed-Mode

Microwaves: Circular Multicusp Waveguide

with a Dimension below Cutoff

Introduction

The plasma produced by high-power, short-pulse microwaves is of interest

[1,2]. In the previous chapter, we saw that the plasma state between the

pulses is a useful phase of the discharge [3]. The active plasma in the inter-

pulse regime is favorable for the production of radicals, metastables, multi-

charged ions [4], negative ions [3], or for various plasma–chemical reactions.

Other important applications include laser guiding through plasma in nar-

row tubes for particle acceleration [5] and inner-surface processing of sma