December 2013
Intermediate to advanced
392 pages
13h 29m
English
Content preview from Compact Plasma and Focused Ion Beams
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Introduction to Focused Ion Beams
Focused Ion Beams
Ion beam tools are becoming increasingly important with the rapid develop-
ment of nanotechnology. Focused ion beam (FIB) systems are widely used
for nanostructuring, nanoimplantations, deposition, material research, and
more [1–3]. However, commercially available liquid metal ion source (LMIS)-
based FIB systems are capable of providing only gallium (Ga) ions as output.
This limits its functionality and applicability in areas where FIBs of other
elements are required. Moreover, contamination issues associated with the
use of Ga ions can be signicant in certain applications [4].
The heavier ...
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