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Compact Plasma and Focused Ion Beams
book

Compact Plasma and Focused Ion Beams

by Sudeep Bhattacharjee
December 2013
Intermediate to advanced
392 pages
13h 29m
English
CRC Press
Content preview from Compact Plasma and Focused Ion Beams
359
24
Summary and Future Prospects
A summary of the important results of MEFIB (multi-element-focused ion
beam) is presented in this chapter. An MEFIB system using a microwave
multicusp plasma source with a dimension at or below cutoff has been devel-
oped. The development is an outcome of basic research carried out in the
generation of compact microwave plasmas. Further investigations have been
carried out on the utilization of the compact plasmas as an ion source, beam
extraction measurements, design and optimization of beam optics using
computational tools, fabrication and installation of the complete MEFIB sys-
tem, and nally the focused bea ...
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Publisher Resources

ISBN: 9781466557888