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Summary and Future Prospects
A summary of the important results of MEFIB (multi-element-focused ion
beam) is presented in this chapter. An MEFIB system using a microwave
multicusp plasma source with a dimension at or below cutoff has been devel-
oped. The development is an outcome of basic research carried out in the
generation of compact microwave plasmas. Further investigations have been
carried out on the utilization of the compact plasmas as an ion source, beam
extraction measurements, design and optimization of beam optics using
computational tools, fabrication and installation of the complete MEFIB sys-
tem, and nally the focused bea ...