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Compact Plasma and Focused Ion Beams
book

Compact Plasma and Focused Ion Beams

by Sudeep Bhattacharjee
December 2013
Intermediate to advanced
392 pages
13h 29m
English
CRC Press
Content preview from Compact Plasma and Focused Ion Beams
75
5
Plasma Production in Continuous-Mode
Microwaves: Near-Circular Multicusp
Introduction
This chapter describes the experimental set-up used for experiments with
continuous- mode microwaves. The plasma conguration including the
microwave system, the vacuum chamber, the pumping system, and other
experimental accessories is described in detail. Thereafter, the production of
microwave plasma in a circular waveguide with the transverse dimension
smaller than the cutoff value is discussed. The construction of the waveguide
makes it slightly polygonal, so its cross-section is referred to as near circular.
In this experiment, a circular conducting t ...
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Publisher Resources

ISBN: 9781466557888