Biomaterials for MEMS

Chapter One

Introduction

M. Chiao

∗

and J.-C. Chiao

†

∗

Department of Mechanical Engineering, University of British C olumbia,

6250 Applied Science Lane, Vancouver, V6T 1Z4 Canada.

E-mail: [e-mail]

†

Department of Electrical Engineering, Nedderman 538, Box 19016,

University of Texas at Arlington, Arlington, TX 76019-0016, USA.

E-mail: [e-mail]

Biomaterials have been used in biomedical industry to produce implantable devices

for the last several decades. Most of such devices have utilized conventional

manufacturing processes. MEMS (Microelectromechanical systems) uses microma-

chining techniques to build miniature devices and can enable novel applications.

Over the last decade, biomaterial-based MEMS devices have found applications

in medici ...