Biomaterials for MEMS

Introduction 5

substrate. These commonly-used manufacturing methods have been implemented

for conventional industries and matured with values in cost effectiveness and mass

production. They are now being considered, with some adjustments and fine-

tuning in procedures, processes, apparatus, and formula, for advanced bioMEMS

and biomaterial fabrication and manufacturing.

1.3 BIOMEDICAL MICRODEVICES

MEMS community has been focusing on many biological applications, and the

field of BioMEMS has grown rapidly and significantly. Some of the demon-

strated devices and fabrication materials are summarized in Table 1.2. This

summary only serves as an example of