
28111.2 Microfabrication
was borrowed from optics manufacturing, and many of the vacuum techniques come
from nineteenth-century physics research. Electroplating is also a nineteenth-century
technique adapted to produce micrometre scale structures, as are various stamping and
embossing techniques [9].
11.2.1 MICROFABRICATION TECHNIQUES
Microfabrication techniques can be classied as follows: (1) property modication,
(2) patterning, (3) subtractive processes and (4) additive processes and packaging [10].
11.2.1.1 Property modification
Property modication techniques include alteration of the substrate by (i) doping (the
process of intentionally ...