306CHAPTER 12 Nanocrystalline diamond for RF-MEMS applications
all-metal switch in terms of reliability and power handling capabilities. Furthermore,
diamond-based switches can be operated at high temperatures and have been tested
mechanically up to 850°C. Figure 12.10[41] shows the SEM image of the diamond-
based CPW switch. The device was fabricated using sacricial technology and later
integrated into a CPW structure. The switch was tested in both atmospheric and
vacuum conditions in which, due to air damping, the switching speed is doubled
to those tested in vacuum conditions. Small signal measurements were done on the
switches yielding ...
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