54CHAPTER 3 Advanced characterization techniques for nanostructures
3.1 MEASUREMENT OF THE TOPOLOGY OF
NANOSTRUCTURES
3.1.1 FIELD EMISSION SCANNING ELECTRON MICROSCOPE
Scanning electron microscopes (SEMs) have been used by researchers since 1935 to
examine micrometre scale structures and more often recently to examine nanoscale
structures [1,2]. This is a versatile technique with which relatively large samples can
be visualized, dimensional measurements can be taken and compositional analysis can
be performed. The SEM works by initially ring primary electrons at the sample to be
imaged. Electrons are dislodged from the atoms at the surface ...
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