to remove a small amount of materials. It consists of polishing, lapping and
honing, etc.
3. Nonmechanical nanometric machining. It comprises focused ion beam machining,
micro-Electro Discharge Machining (EDM), and excimer laser machining.
4. Lithographic method. It employs masks to specify the shape of the product.
Two-dimensional shapes are the main outcome; severe limitations occur when
3D products are attempted. It mainly includes X-ray lithography, Lithographie
Galvanische Abformung (LiGA), and electron beam lithography.
Mechanical nanometric ...
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