78CHAPTER 3 Advanced characterization techniques for nanostructures
interface. No peculiarities were observed for non-annealed samples; Si, Al and O
were smoothly distributed under the sample surface. However, after annealing, this
distribution changed dramatically. The Al and Si proles overlapped (see Figure
3.15).
Annealing caused the Al overlayer to become enriched with Si. A combination of
the chemical substitution reaction 4Al 3SiO
2
Al
2
O
3
3Si at the interface and
out-diffusion of Si into the metal was believed responsible. Local internal stresses
in the ZERODUR were also detected, using a modulation–polarization technique.
3.3.4 ...
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