
29912.5 Techniques for the characterization of NCD films
in the hydrogen concentration from 99% to 1% reduces the grain size of the diamond
from several microns to few nanometres. The phase-pure nanodiamond lms were
grown from a gaseous mixture of C
60
/Ar in microwave plasma CVD with a total
argon pressure of 98 torr, C
60
partial pressure of 0.01torr, a total ow of 100 sccm
and at a microwave power of 800 W. A C
2
dimer-based growth mechanism that would
result in nanocrystalline structure was proposed [32]. In the lms deposited using 5%
CH
4
and 95% Ar, the C
2
dimers resulted in the inclusion of an amorphous carbon or
graphitic carbon [33]. Such ...