
22 CHAPTER 2 Gas phase nanofication
in 5% H
2
/Ar mixture (ow rate of 100 sccm) at 700°C for 6 h. In one case, reduction
was carried out for 8 h as well.
2.4.2 CHARACTERIZATION
Structural and microstructural examination of the as-received foils, raw powders and
the products after each of the redox reactions was conducted by XRD, scanning and
transmission electron microscopy (SEM/TEM) to corroborate the observed enhance-
ment in sensing characteristics of the thick-lm sensors.
2.4.3 HIGH TEMPERATURE REDUCTIVE ETCHING PROCESS
In the case of powder samples, the thick-lm sensors in chemiresistor mode were
fabricated as follows. The powders were rst ...