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CRYSTAL GROWTH AND
EVALUATION OF SILICON
for VLSI and ULSI
CRYSTAL GROWTH AND EVALUATION OF SILICON
for VLSI and ULSI
Golla Eranna
Eranna
Ingot cover image: © Wacker Chemie AG
Silicon, as a single-crystal semiconductor, has sparked a revolution in the eld
of electronics and touched nearly every eld of science and technology. Though
available abundantly as silica and in various other forms in nature, silicon is dif-
cult to separate from its chemical compounds because of its reactivity. As a
solid, silicon is chemically inert and stable, but growing it as a single crystal cre-
ates many technological challenges.
Crystal Growth ...