December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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210 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
6.26 van der Pauw Resistivity Measurement
Technique for Irregular-Shaped Wafers
The van der Pauw method is a technique commonly used to measure the resistivity of any
conducting sample. Its power lies in its ability to accurately measure the properties of a
sample of any arbitrary shape, so long as the sample is approximately two-dimensional,
without any openings, and the contacts are made at the perimeter for measurements. With
this method, one can estimate the resistivity, dopant type, sheet carrier density, and mobil-
ity of the majority carriers. The method was rst propounded ...
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