Crystal Growth and Evaluation of Silicon for VLSI and ULSI

11Introduction

atoms is known as n-type silicon and that which contains a majority of acceptor atoms is

known asp-type silicon.

Not all impurity atoms can t well within the silicon lattice at substitution positions.

Among the popular impurity atoms, only arsenic impurity matches perfectly with the

silicon lattice, whereas other impurities, such as boron, phosphorus, gallium, aluminum,

indium, and antimony, produce strain in the lattice locations. The mist factors are listed

in Table 1.2 [31]. Because of the limited options, any one of the listed species can be selected

for silicon doping by altering the electrical conduction properties.

1.