December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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245Resistivity and Impurity Concentration Mapping of Silicon Wafers
References
1. J. H. Wang, “Resistivity distribution of silicon single crystals using codoping,” Journal of Crystal
Growth, 280, 408–412, 2005.
2. K. Sugawara, K. Ozeki, K. Fujioka, Y. Mamada, M. Igai, and H. Hirayama, “Finite difference
analysis of radial phosphorus dopant distribution in Czochralski-grown silicon single crys-
tals,” Journal of the Electrochemical Society, 148, G475–G480, 2001.
3. J. H. Wang, “Resistivity distribution in bulk growth of silicon single crystals,” Journal of Crystal
Growth, 275, e73–e78, 2005, and the references therein.
4. W. Zuhlemer and ...
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