December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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37Silicon: The Key Material for Integrated Circuit Fabrication Technology
this gradient causes variations in the electric conductivity and in the current density
within the rod. For large-diameter, polysilicon-grown rods, the interior temperature may
approach the melting point of silicon. Computer models are reported by Li et al. [42] for
the rods’ growth diameter, applied voltage, power consumption, current distribution, and
ow statistics to obtain better results.
2.5 Ultra-High Pure Silicon for Electronics Applications
By using the previously discussed method, polysilicon rods up to 20 cm in diameter and
several meters in length can be grown. ...
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