December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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172 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
References
1. http://www.google.co.in and www.sz-wholesaler.com/userimage/1229/1230sw2/silicon-ingot-
p.176.jpg.
2. J. D. Plummer, M. D. Deal and P. B. Grifn, Chapter-3: Lecture notes on silicon crystal structures
and growth, 18_Silicon.ppt, EE-452, 13-1 to 13-60. (Source Internet and https://www.google.co.in
and www.powershow.com/view/abbbc-ODQ3O/Silicon_Structure_and_Growth_Powerpoint_
ppt_presentation.)
3. C. W. Pearce, “Crystal growth and wafer preparation” in VLSI Technology, edited by S. M. Sze,
McGraw-Hill, New York, 1988, and the references therein.
4. H. H. Gegenwarth, ...
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