
240 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9
3.00E+15 1.57E+00 1.53E+00 1.48E+00 1.44E+00 1.40E+00 1.36E+00 1.33E+00 1.29E+00 1.26E+00 1.23E+00
4.00E+15 1.20E+00 1.18E+00 1.15E+00 1.12E+00 1.10E+00 1.08E+00 1.06E+00 1.04E+00 1.02E+00 9.97E−01
5.00E+15 9.78E−01 9.61E−01 9.44E−01 9.27E−01 9.12E−01 8.96E−01 8.82E−01 8.68E−01 8.54E−01 8.41E−01
6.00E+15 8.28E−01 8.16E−01 8.04E−01 7.92E−01 7.81E−01 7.70E−01 7.59E−01 7.49E−01 7.39E−01 7.29E−01
7.00E+15 7.20E−01 7.11E−01 7.02E−01 6.93E−01 6.85E−01 6.76E−01 6.68E−01 6.60E−01 6.53E−01 6.45E−01
8.00E+15 6.38E−01 6.31E−01 6.24E−01 6.17E−01 6.11E−01 6.04E−01 ...