December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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42 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
11. T. Oishi, M. Watanabe, K. Koyama, M. Tanaka, and K. Saegusa, “Process for solar grade sili-
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12. C. W. Pearce, “Crystal growth and wafer preparation” in VLSI Technology, edited by S. M. Sze,
McGraw-Hill, New York, 1988, and the references therein.
13. T. L. Chu, S. S. Shirley, S. Chu, R. W. Kelm, Jr., and G. W. Wakeeld, “Solar cells from zone-
rened metallurgical silicon,” Journal of the Electrochemical Society, 125, 595–597, 1978.
14. L. P. Hunt, “Compositional analysis of silicon for solar cells,” Journal of the Electrochemical
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