December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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94 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
4.3.6 Dopant Addition for Growing Doped Crystals
Dopant species are generally added in the initial stages of the melt process along with
the polysilicon blocks. In some cases, dopant is added directly to the charge, and in other
cases, heavily doped polysilicon blocks are added. The latter option is better suited for
crystals where lightly doped silicon crystals are desired. Direct addition of dopant has
a disadvantage when the silicon is being melted. If the dopant vapor pressure is high,
the dopant could escape from the charge before the silicon is totally melted. Once the
dopant is inside the melt, proper mixing is important to get a uniformly doped silicon
crystal. Incorpora ...
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