December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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387Packing of Silicon Wafers
has used numerical calculations to model the phenomenon. An equation composed of
the adsorption rate from the gas phase to the silicon wafer surface and the desorption
rate from the silicon wafer surface was developed that accounts for competitive pro-
cesses in a multicomponent system. This equation can describe and predict the actual
increase and decrease in the surface concentrations of propionic acid ester, siloxane (D9),
and di(2-ethylhexyl)phthalate (DOP). Organic species with a large adsorption rate and
a small desorption rate remain in signicant abundance on the silicon wafer surface for
a very long period after cleaning. Based on the concept of fruit basket phenomenon a
computer model, multicomponent o ...
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