December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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32 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
and many of its compounds are not poisonous and hazardous except as noted here and
elsewhere. The only exception is the industrial disease silicosis, which affects industrial
workers exposed to silica dust for longer periods. Eckhoff et al. [17] reported that ne
silicon powders present a signicant explosion hazard, although not as severe as that
of ne powders of aluminum metal. They suggested that by taking appropriate precau-
tions, such as preventing electric sparking, strictly controlling the hot work, providing
explosion vents, and maintaining good housekeeping, the dust explosi ...
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