December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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109Different Techniques for Growing Single-Crystal Silicon
(a)
(b)
FIGURE 4.27
(a) Striation patterns in the outer regions of the grown crystal. (b) Spiral streamlines at the surface of a rotating
disk. (From B. K. Jindal, V. V. Karelin, and W. A. Tiller, Journal of the Electrochemical Society, 120, 101–105, 1973
[223].)
110 Crystal Growth and Evaluation of Silicon for VLSI and ULSI
in the amount of oxygen assimilated by the crystal when a magnetic eld is applied.
Hjellming and Walker [233] studied the mass transport of oxygen in a CZ silicon cryst ...
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