Crystal Growth and Evaluation of Silicon for VLSI and ULSI

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Introduction

Crystals are the best examples of the order and symmetry in nature, and this systematic

arrangement of atoms or molecules in three-dimensional ways, in perfect order, highlights

many interesting aspects of science and technology. Very few materials exhibit this type of

natural perfection at atomic levels in their arrangement. Growing or arranging crystals in

a regular and perfect order by articial methods shows an insight into the bonding behav-

ior between these atoms or molecules and the way they arrange themselves methodically,

while transforming from a liquid state to a solid state.

In the case of crystalline solids, the a