December 2014
Intermediate to advanced
430 pages
18h 9m
English
Content preview from Crystal Growth and Evaluation of Silicon for VLSI and ULSI
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About the Author
G. Eranna, PhD, obtained his master’s degree in physics in
1978 from Sri Venkateswara University, Tirupati, India, with
a top rank in the eld of semiconductor physics. After that,
he joined the Indian Institute of Technology (IIT) Madras,
India, to work on silicon processing technology for the
development of microwave p-i-n diodes and also obtained
his PhD in 1985 from the same institute for his work on the
process modeling of diffusion in silicon devices. Later, he
moved to the IIT Kharagpur Microelectronic Centre and he
was associated with it until 1991. Dr. Eranna joined CEERI,
Pilani, India, as a scientist and is presently ...
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