
235Resistivity and Impurity Concentration Mapping of Silicon Wafers
6.00E+02 7.00E+12 6.80E+12 6.70E+12 6.60E+12 6.50E+12 6.40E+12 6.30E+12 6.20E+12 6.10E+12 6.00E+12
7.00E+02 6.00E+12 5.90E+12 5.80E+12 5.70E+12 5.60E+12 5.60E+12 5.50E+12 5.40E+12 5.30E+12 5.30E+12
8.00E+02 5.20E+12 5.10E+12 5.10E+12 5.00E+12 5.00E+12 4.90E+12 4.80E+12 4.80E+12 4.70E+12 4.70E+12
9.00E+02 4.60E+12 4.60E+12 4.50E+12 4.50E+12 4.40E+12 4.40E+12 4.30E+12 4.30E+12 4.20E+12 4.20E+12
1.00E+03 4.20E+12 3.80E+12 3.50E+12 3.20E+12 3.00E+12 2.80E+12 2.60E+12 2.40E+12 2.30E+12 2.20E+12
2.00E+03 2.10E+12 2.00E+12 1.90E+12 1.80E+12 1.70E+12 1.60E+12 1.60E+12 1.50E+12 1.50E+12