October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
O’Reilly covers everything we've got, with content to help us build a world-class technology community, upgrade the capabilities and competencies of our teams, and improve overall team performance as well as their engagement.I wanted to learn C and C++, but it didn't click for me until I picked up an O'Reilly book. When I went on the O’Reilly platform, I was astonished to find all the books there, plus live events and sandboxes so you could play around with the technology.I’ve been on the O’Reilly platform for more than eight years. I use a couple of learning platforms, but I'm on O'Reilly more than anybody else. When you're there, you start learning. I'm never disappointed.I'm always learning. So when I got on to O'Reilly, I was like a kid in a candy store. There are playlists. There are answers. There's on-demand training. It's worth its weight in gold, in terms of what it allows me to do.
Contents
Preface
to
Series
ix
Preface
χ
Contributors xii
APPLICATION OF MATERIALS CHARACTERIZATION TECH-
NIQUES
TO SILICON EPITAXIAL GROWTH
1.1 Introduction I
1.2
Silicon
Epitaxial Growth 2
Basic Chemical Reactions 2, Precleaning Considerations 3,
Reactor Types 3
1.3 Film and Process Characterization 4
Crystal
Quality 4, Preclean Quality 6, Thickness 9, Dopant
Concentration and Dopant Profiling 12
1.4
Selective
Growth 14
Basic Process Considerations 14»
Defect
Density and Growth
Morphology 15, Preclean Quality 18, Thickness 18
1.5 Sij _
x
Gc
x
Epitaxial Growth 18
Material
Considerations l8, Reactor Types 19
1.6
Si
j_
x
Ge
x
Material Characterizatio ...
Become an O’Reilly member and get unlimited access to this title plus top books and audiobooks from O’Reilly and nearly 200 top publishers, thousands of courses curated by job role, 150+ live events each month,
and much more.
Read now
Unlock full access
More than 5,000 organizations count on O’Reilly
O’Reilly covers everything we've got, with content to help us build a world-class technology community, upgrade the capabilities and competencies of our teams, and improve overall team performance as well as their engagement.Julian F.
I wanted to learn C and C++, but it didn't click for me until I picked up an O'Reilly book. When I went on the O’Reilly platform, I was astonished to find all the books there, plus live events and sandboxes so you could play around with the technology.Addison B.
I’ve been on the O’Reilly platform for more than eight years. I use a couple of learning platforms, but I'm on O'Reilly more than anybody else. When you're there, you start learning. I'm never disappointed.Amir M.
I'm always learning. So when I got on to O'Reilly, I was like a kid in a candy store. There are playlists. There are answers. There's on-demand training. It's worth its weight in gold, in terms of what it allows me to do.