October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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X-Ray Diffraction
(XRD)*
30
In X-ray diffraction (XRD) a collimated beam of X
rays,
with wavelength λ ~
0.5-2 Â, is incident on a specimen and is diffracted by the crystalline phases in the
specimen according to Bragg's law (λ = 2d sin Θ, where d is the spacing between
atomic planes in the crystalline phase). The intensity of the diffracted X
rays
is
measured as a function of the diffraction angle 2Θ and the specimen's orientation.
This diffraction pattern is used to identify the specimen's crystalline phases and to
measure its structural properties, including strain (which is measured with great
accuracy),
epitaxy, and the size and orientatio ...
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