October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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Figure
6.4
XTEM images
of (a)
as-deposited
and ib) 460
°C, 40-min
an-
nealed Tl/AI-Si metal structures
on
oxide substrate.
The
rough Tl/AI-Si interface
in the
annealed sample is from AI
3
Tî
intermetallic compound formation.
destructive, and their data is more complex and difficult to interpret. However, they
can be used in a spatially resolved manner to check for lateral inhomogeneity.
The interaction between the barrier and the aluminum can be examined micro-
structurally using XTEM. XTEM images of as-deposited and 430 °C, 70-min
annealed
Si02/Ti/Al-2%
Si samples are shown in Figure 6.4. The Ti/Al-2% Si
interface is well-defined and sharp in
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