Characterization in Silicon Processing

3.8

Summary

Studied for nearly a century, metal suicides have

found

a variety of

applications.

In

this chapter we discuss the use of various characterization techniques

that

have been

used in studying (1) the formation of

silicides,

(2) the properties of

suicides,

(3) the

processing of the

silicides,

and (4) stability of the

silicides.

A great

number

of

analytical

techniques such as RBS,

SIMS,

AES, resistance monitoring technique,

XRD, TEM, Schottky barrier height measurements, ellipsometry, and stress-strain

measurements are used to elucidate the desired information. Examples of such

applications are given and discussed.

Recent advances i