
Also
note
how these are removed after some surface cleaning via sputtering in the
AES system (Figure 4.14£), which demonstrates
that
they were surface species.
References
ι
A. J. Learn. /
Electrochem.
Soc. 133 (6), 394, 1976.
2
P. Burggraaf.
Semiconductor
Internation.
73, Nov. 1985.
3
J. K. Howard, J. F. White, and P. S. Ho. /
Appl
Phys.
49 (7), 4083, 1978.
4
J. S. Cho, H.-K. Kang, M. A.
Beily,
S. S. Wong, and C. H. Tong. SRC Pub.
C91137.
Semiconductor Research Corp., Triangle Park, NC, 1 Feb. 1991.
5
S. P. Murarka. SRC Pub. C90555. Semiconductor Research Corp., Triangle
Park, NC, 31 Oct. 1990.
6
J. L. Vossen and W. Kern. Thin
Film
Processes. ...