Characterization in Silicon Processing

Auger Electron Spectroscopy

(AES)*

1

Auger electron spectroscopy (AES) uses a focused electron beam to create secondary

electrons near the surface of a solid sample. Some of these (the Auger electrons)

have energies characteristic of the elements and, in many cases, of the chemical

bonding of the atoms from which they are released. Because of their characteristic

energies

and the shallow

depth

from which they escape without energy loss, Auger

electrons are able to characterize the elemental composition and, at times, the

chemistry of the surfaces of

samples.

When used in combination with ion sputter-

ing to gradually remove the surface, Auge ...