Characterization in Silicon Processing

Rutherford Backscattering Spectrometry

(RBS)*

19

Rutherford backscattering spectrometry (RBS)

analysis

is performed by bombard-

ing a sample target with a monoenergetic beam of high-energy particles,

typically

helium,

with an energy of a few MeV. A fraction of the incident atoms scatter

backwards

from heavier atoms in the near-surface region of the target material, and

usually

are detected with a solid state detector

that

measures their energy. The

energy

of a backscattered particle is related to the

depth

and mass of the target

atom, while the number of backscattered particles detected from any given element

is

proportional to concentration ...