October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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Of
all
the
silicides,
only silicides of groups IVA, VA, and VIA, called the refrac-
tory metal
silicides,
and of group VIII, called the near-noble-metal
silicides,
are of
particular interest to us. Fortunately, silicon-rich silicides are
most
stable and gen-
erally
most
conducting. The refractory metal silicides (with higher melting points)
would be suitable for high-temperature applications. On the
other
hand, group
VIII
metal silicides
will
be useful for low-temperature applications.
Refractory disilicides of Mo, Ta, Ti, and W with respective thin-film resistivities
of
about
100-120, 50-65, 15-25, and 60-70 μΩ-cm are being used on top of th ...
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