October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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Transmission Electron Microscopy
(TEM)*
28
In transmission electron microscopy (TEM) a thin solid specimen (< 200 nm
thick)
is bombarded in vacuum with a highly-focused, monoenergetic beam of
electrons.
The beam is of sufficient energy to propagate through the specimen. A
series
of
electromagnetic
lenses
then
magnifies this transmitted electron
signal.
Dif-
fracted electrons are observed in the form of a diffraction pattern beneath the
specimen.
This information is used to determine the atomic structure of the mate-
rial
in the sample. Transmitted electrons form images from small regions of sample
that
contain contrast, due to several scatterin ...
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