Characterization in Silicon Processing

6

Barrier Films

M. LAWRENCE Α. DASS

Contents

6.1

Introduction

6.2 Characteristics of Barrier Films

6.3 Types of Barrier Films

6.4 Processing Barrier Films

6.5 Examples of Barrier Films

6.6 Summary

6.1

Introduction

Very

large scale integrated

(VLSI)

devices are made up of stacks of complex thin-

film

materials,

which need to be chemically inert and thermodynamically stable

both

during device processing and

throughout

device lifetime. In general, the

choice of

materials

is based on electrical properties for optimum device functioning

and

less

on their chemical compatibility. This results in heterojunctions with large

concentration gradients whic ...