October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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Static Secondary
Ion
Mass Spectrometry
(Static
SIMS)*
25
Static
secondary ion mass spectrometry
(SIMS)
involves the bombardment of a
sample with an energetic (typically 1-10 keV) beam of particles, which may be
either ions or neutrals. As a result of the interaction of these primary particles with
the sample, species are ejected
that
have become ionized. These ejected species,
known as secondary ions, are the analytical signal in SIMS.
In static SIMS, the use of a low dose of incident particles (typically less than
5 X 10
12
atoms/cm
2
) is critical to maintain the chemical integrity of the sample
surface during
analysis.
A mass spectrometer sort ...
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