October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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Preface
to
Series
This Materials Characterization Series attempts to address the needs of the practical
materials
user, with an emphasis on the newer areas of surface, interface, and thin
film microcharacterization. The Series is composed of the leading volume,
Encyclo-
pedia of
Materiah
Characterization,
and a set of
about
10 subsequent volumes con-
centrating on characterization of individual materials classes.
In the
Encyclopedia,
50 brief
articles
(each 10 to 18 pages in length) are presented
in
a standard format designed for ease of reader access, with straightforward tech-
nique descriptions and examples of their practical use. In additio ...
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