Characterization in Silicon Processing

Figure

6.12 XTEM image of

TIN

on Si,

as

for Figure

6.11,

show-

ing

large regions of grain

boundaries.

in

the TiN film can be deduced from the density of the film. Density can be

calculated

from the mass and thickness of the TiN film deposited. Density (in

g/cm

3

)

also can be calculated from the areal density of Ti or Ν atoms obtained from

the RBS studies, from accurate determination of the physical thickness of the film,

and by using the relation

(volume density)(molecular weight) ^ ^

(Avogadros number, 6.02 X 10

23

)(no. of atoms per molecule)

where the volume density in atoms/cubic centimeters equals the areal density in

atoms/square centimeters/thicknes ...