October 2013
Intermediate to advanced
240 pages
11h 53m
English
Content preview from Characterization in Silicon Processing
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Spreading Resistance Analysis (SRA) 24
ROGER
BRENNAN
and
DAVID
DICKEY
Spreading
resistance
analysis
(SRA) is a method of dopant profiling that
relies
on
the relationship between dopant concentration and electrical
resistivity
in semicon-
ductors. In SRA, the resistivity profile is determined from resistance measurements
made between two probes at a series of locations along a beveled surface of the
sample.
The method is used extensively on silicon, where it is
generally
an inexpen-
sive
way of obtaining a wealth of information. The accuracy for dopant concentra-
tions is generally in the 10-30% range; and that for depth is
typically
better tha ...
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