Characterization in Silicon Processing

Preface

This volume has been written to aid materials users working with silicon-based

semiconductor systems. Materials problems arise in all stages of semiconductor

device

production: research and development of new processes, devices, or inte-

grated circuit technologies; new process equipment definition and new process

start-up; operation of state-of-the-art processes in wafer fabrication

facilities;

and

throughout

the

life

of each wafer fabrication process.

These materials problems are sometimes investigated using only electrical tests,

but they can often be more

clearly

identified by using an appropriate selection of

materials

characterizatio ...