In each of these applications, certain materials properties of the polysilicon are
critical
to the operation of the device.
A variety of characterization tools have been used at each of the many steps of
the manufacturing process to monitor the properties of the polysilicon and to solve
processing problems. Different properties must be monitored at different steps in
the process to ensure the correct values of the critical properties in the final product.
This chapter discusses a recommended set of characterization tools and their use in
measuring materials properties which are of concern in a generic process. The
chapter is organized as a
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