Characterization in Silicon Processing

2

Polysilicon Conductors

YALE

STRAUSSER

Contents

2.1 Introduction

2.2 Deposition

2.3 Ion Implantation Doping

2.4 Patterning

2.5 Subsequent Processing

2.1

Introduction

Single-crystal

silicon, silicon dioxide, and polycrystalline silicon (polysilicon) are

the three materials that enabled the semiconductor revolution. The existence of

these three forms of the same very abundant material, with the properties to provide

a

semiconductor, insulator, and conductor, respectively, is the cornerstone of the

technology. They are also the most widely used materials in semiconductor inte-

grated circuit (IC) manufacturing. This is probably no surprise to