Gaseous Electronics

67

SULFURYL FLUORIDE

CONTENTS

67.1 Ion Appearance Potentials

67.2 Attachment Cross Sections

67.3 Attachment Rates

References

 

Sulfuryl fluoride (SO₂F₂) is an abundant by-product of the decomposition of SF₆ gas (Datskos and Christophorou, 1989).

67.1 ION APPEARANCE POTENTIALS

Ion appearance potentials measured with mass spectrometer (Reese et al., 1958) are shown in Table 67.1.

67.2 ATTACHMENT CROSS SECTIONS

Electron attachment occurs at low energy (≤1.0 eV) both dissociatively and nondissociatively according to reactions

$${\text{SO}}_2{\text{F}}_2+\text{e}\to {\text{SO}}_2{\text{F}}_2^{-*}\to {\text{SO}}_2{\text{F}}_2^{-}$$ (67.1)

$${\text{SO}}_2{\text{F}}_2+\text{e}\to {\text{SO}}_2{\text{F}}_2^{-*}\to {\text{SO}}_2{\text{F}}^{-}+\text{F}$$ (67.2)

$${\text{SO}}_2{\text{F}}_2+\text{e}\to {\text{SO}}_2{\text{F}}_2^{-*}\to {\text{SO}}_2\text{F}+{\text{F}}^{-}$$ (67.3)

TABLE 67.1Ion Appearance Potentials

Process	Potential (eV)
Positive ions
${\text{SO}}_2{\text{F}}_2+\text{e}\to {\text{SO}}_2{\text{F}}_2^{+}+2\text{e}$	13.3