September 2018
Intermediate to advanced
822 pages
27h 53m
English
Content preview from Gaseous Electronics
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69
TETRACHLOROSILANE
CONTENTS
Tetrachlorosilane (SiCl4) is a nonpolar, electron-attaching molecule with 82 electrons and its ionization potential is 11.79 eV.
69.2 TOTAL SC ATTERING C ROSS SEC TION
Highlights of total scattering cross section are
1.A resonance at ∼2.0 eV possibly due to dissociative attachment
2.A shoulder at 5.5 eV and resonance peak at ∼10 eV due to electron attachment (see Appendix 8)
3.A monotonic decrease of cross section beyond 10 eV, which is a common feature in many gases (see Table 69.2)
69.3 IONIZATION CROSS SECTION
Appearance potentials ...
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