Gaseous Electronics

91

TUNGSTEN HEXAFLUORIDE

CONTENTS

91.1 Total Scattering Cross Section

91.2 Ionization Cross Section

91.3 Attachment Rate Constant

References

 

Tungsten hexafluoride (WF₆) is an electron-attaching gas with 128 electrons. It has six modes of vibration as shown in Table 91.1 (Shimanouchi, 1972).

The parent negative ion WF₆⁻ forms at an energy of ∼3 eV (see de Wall and Neuert, 1977). Electron impact excitation studies have been carried out by Rianda et al. (1979) who find excitation maxima at 7.5, 7.9, 8.5, and 9.85 eV.

TABLE 91.1Vibrational Modes and Energies of WF₆ Molecule

TABLE 91.2Total scattering cross sections for WF₆

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